Improving the Production of High-performance β-Ga<sub>2</sub>O<sub>3</sub> Based Solar-Blind Schottky Barrier Photodiode

Zhe Li

doi:https://doi.org/10.7567/SSDM.2020.E-8-04

11:45 〜 12:00

[E-8-04] Improving the Production of High-performance β-Ga₂O₃ Based Solar-Blind Schottky Barrier Photodiode

〇Zhe Li¹, Chunfu Zhang¹, Yu Xu¹, Zhuangzhuang Hu¹, Weidong Zhu¹, Dazheng Chen¹, Qian Feng¹, Jincheng Zhang¹, Yue Hao¹ (1. Wide Bandgap Semiconductor Tech. Disciplines State Key Lab., School of Microelectronics, Xidian Univ.(China))

https://doi.org/10.7567/SSDM.2020.E-8-04

2020 International Conference on Solid State Devices and Materials

[E-8-04] Improving the Production of High-performance β-Ga2O3 Based Solar-Blind Schottky Barrier Photodiode

[E-8-04] Improving the Production of High-performance β-Ga₂O₃ Based Solar-Blind Schottky Barrier Photodiode