The Japan Society of Applied Physics

12:13 PM - 12:20 PM

[A-4-07] In-situ Deposited HfO2 and Y2O3 on Epi-Si/p-Ge – a Comparative Study of the Interfacial Properties

〇Tien Yu Chu1, Hsien Wen Wan1, Yi Ting Cheng1, Chao Kai Cheng 1, Yu Jie Hong1, Jueinai Kwo2, Minghwei Hong Hong1 (1.Granduate Institute of Applied Physics and Department of Physics, National Taiwan Univ., Taipei 10617, 2.Department of Physics, National Tsing Hua Univ., Hsinchu 30013)

https://doi.org/10.7567/SSDM.2021.A-4-07