The Japan Society of Applied Physics

11:06 〜 11:13

[A-8-04] Simulation Study on Memory Characteristics of IGZO-Channel FeFET from 2D Planer to 3D Vertical Structure for Channel Structure Engineering

Fei Mo1、Xiaoran Mei1、Takuya Saraya1、Toshiro Hiramoto1、〇Masaharu Kobayashi1 (1.Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2021.A-8-04