Co-integration of ReRAM with OTS back-end selector for high density Crosspoint arrays

Gabriel Molas

doi:https://doi.org/10.7567/SSDM.2021.B-2-01

3:45 PM - 4:15 PM

[B-2-01 (Invited)] Co-integration of ReRAM with OTS back-end selector for high density Crosspoint arrays

〇Gabriel Molas¹, Joel Minguet Lopez¹, Laurent Grenouillet¹, Catherine Carabasse¹, Lucas Reganaz¹, Gabriele Navarro¹, Chiara Sabbione¹, Mathieu Bernard¹, Niccolo Castellani¹, Damien Deleruyelle³, Marc Bocquet², Jean-Michel Portal², Nazim Ait Abdelkader ⁴, Quentin Rafhay⁴, François Andrieu¹ (1.CEA-Leti, 2.IM2NP CNRS, France, 3.INL CNRS, France , 4.IMEP LAHC CNRS, France)

https://doi.org/10.7567/SSDM.2021.B-2-01

2021 International Conference on Solid State Devices and Materials

[B-2-01 (Invited)] Co-integration of ReRAM with OTS back-end selector for high density Crosspoint arrays