14:51 〜 14:58
[C-5-05] Mapping of Contactless Photoelectrochemical Etched GaN Schottky Contacts Using Scanning Internal Photoemission Microscopy --- Difference in Electrolytes ---
〇Kenji Shiojima1、Ryo Matsuda1、Fumimasa Horikiri2、Yoshinobu Narita2、Noboru Fukuhara2、Tomoyoshi Mishima3
(1.Univ. of Fukui、2.SCIOCS、3.Hosei Univ.)
https://doi.org/10.7567/SSDM.2021.C-5-05