16:29 〜 16:36
[D-6-04] DC Characteristics of the p-NiOx/n-Ga2O3 Junction FETs Based on Heterointegrated Ga2O3-on-SiC by Ion Cutting Process
〇Haodong Hu1、Hehe Gong2、Wenhui Xu3、Yibo Wang1、Tiangui You3、Genquan Han1、Jiandong Ye2、Xin Ou3、Yan Liu1、Yue Hao1
(1.Xidian University、2.Nanjing University、3.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences)
https://doi.org/10.7567/SSDM.2021.D-6-04