Study on the Morphology of Silicon Nanowire Arrays by Using   Highly Doped Silicon

14:37 〜 14:44

[F-1-03] Study on the Morphology of Silicon Nanowire Arrays by Using Highly Doped Silicon

〇Haibin Li¹、Shinya Kato¹、Yasuyoshi Kurokawa²、Tetsuo Soga¹ (1.Univ. of Nagoya Institute of Technology、2.Univ. of Nagoya)