14:37 〜 14:44 [F-5-03] Hydrogenation on Tunnel Nitride Passivated Contacts by Catalytically Generated Atomic Hydrogen 〇YULI WEN1、Huynh Thi Cam Tu1、Keisuke Ohdaira1 (1.JAIST) https://doi.org/10.7567/SSDM.2021.F-5-03