Vertical Channel Metal-Oxide Semiconductor Gas Sensor to Detect ppb-Level NO<sub>2</sub> at Room Temperature

Ting-Hsuan Huang

doi:https://doi.org/10.7567/SSDM.2021.J-2-06

16:43 〜 16:50

[J-2-06] Vertical Channel Metal-Oxide Semiconductor Gas Sensor to Detect ppb-Level NO₂ at Room Temperature

Ting-Hsuan Huang^1,2、Pei-Yi Li^1,2、Hsin-Fei Meng^1,2、〇Hsiao Wen Zan^1,2、Ping-Hung Yeh³、Chia-Jung Lu⁴、Olivier Soppera^5,6 (1.National Yang Ming Chiao Tung Univ.、2.National Chiao Tung Univ.、3.Tamkang Univ.、4.National Taiwan Normal Univ.、5.Univ. of Haute-Alsace、6.Univ. of Strasbourg)

https://doi.org/10.7567/SSDM.2021.J-2-06

2021 International Conference on Solid State Devices and Materials

[J-2-06] Vertical Channel Metal-Oxide Semiconductor Gas Sensor to Detect ppb-Level NO2 at Room Temperature

[J-2-06] Vertical Channel Metal-Oxide Semiconductor Gas Sensor to Detect ppb-Level NO₂ at Room Temperature