Effects of Channel Thickness and Operation Condition on the Sensing Performance of Ultraviolet Photodetectors Based on IGZO Field Effect Diodes

Sin-Jhih Huang

doi:https://doi.org/10.7567/SSDM.2021.J-2-09

17:04 〜 17:11

[J-2-09] Effects of Channel Thickness and Operation Condition on the Sensing Performance of Ultraviolet Photodetectors Based on IGZO Field Effect Diodes

〇Sin-Jhih Huang¹、Meng-Yung Su¹、Chao-Yen Chang¹、Shui-Jinn Wang^1,2、Rong-Ming Ko² (1.Inst. of Microelectronics, Department of Electrical Engineering, National Cheng Kung Univ., Tainan、2.College of Electrical Engineering and Computer Sci., National Cheng Kung Univ., Tainan)

https://doi.org/10.7567/SSDM.2021.J-2-09

2021 International Conference on Solid State Devices and Materials

[J-2-09] Effects of Channel Thickness and Operation Condition on the Sensing Performance of Ultraviolet Photodetectors Based on IGZO Field Effect Diodes