11:50 AM - 11:57 AM

[J-4-07] Effects of Crystallization Conditions on the Electrical Characteristics of P-type Ge TFTs Formed by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation

〇Takuma SATO¹, Hiroaki HANAFUSA¹, Seiichiro HIGASHI¹ (1.Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2021.J-4-07