Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process

Junchen Dong

doi:https://doi.org/10.7567/SSDM.2021.J-5-08

15:12 〜 15:19

[J-5-08] Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process

Junchen Dong^1,2、Jingyi Wang¹、Qi Li¹、Dengqin Xu¹、〇Jingye Xie²、Kai Zhao²、Dedong Han¹、Yi Wang¹、Xing Zhang¹ (1.Peking Univ.、2.Beijing Info. Sci. & Tech. Univ.)

https://doi.org/10.7567/SSDM.2021.J-5-08

2021 International Conference on Solid State Devices and Materials

[J-5-08] Transparent ZnO Thin Film Transistors Fully Fabricated by Atomic-Layer-Deposition Process