The 24th Congress of the International Commission for Optics

講演情報

Oral Presentation

03: Optical Metrology

[F1A] Polarization and Scattering

2017年8月25日(金) 09:10 〜 11:25 Room A (FUJI) (42F)

Session Chair:K. Oka(Hirosaki Univ.)

10:55 〜 11:10

[F1A-07] Analyses of Quality and Optical Processes of Diffraction Gratings by Optical Scatterometry

R. Antos 1, M. Veis 1, J. Mistrik 2, K. Palka 2, P. Janicek 2, M. Karlovec 2, M. Vlcek 2 (1.Charles Univ. (Czech Republic), 2.Univ. of Pardubice (Czech Republic))

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