13:45 〜 14:00 ▲ [17p-F206-1] [Young Scientist Presentation Award Speech] Physical origins of slow traps for ALD high-k dielectrics on GeOx/Ge interfaces 〇Mengnan Ke1、Kimihiko Kato1、Mitsuru Takenaka1、Shinichi Takagi1 (1.Tokyo Univ.)