[A-4-4] An Advanced Room Temperature Cleaning Using a pH Controlled Ozonated Ultrapure Water

Ikunori Yokoi、Geun-Min Choi、Tadahiro Ohmi (1.New Industry Creation Hatchery Center (NICHe), Tohoku University、2.Department of Electronic Engineering, Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2000.A-4-4