[A-8-4] A Technology of reducing Flicker Noise for ULSI applications

Koutarou Tanaka、Kazufumi Watanabe、Hideki Ishino、Shigetoshi Sugawa、Akinoubu Teramoto Masaki Hirayama、Tadahiro Ohmi (1.Management of Science & Technology Department Graduate School of Engineering, Tohoku University、2.Department of Electronic Engineering, Graduate school of Engineering, Tohoku University、3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2002.A-8-4