[P14-1] Micromachining of Silicon Carbide by Silicon Lost Molding, Chemical Vapor Deposition And Reaction-Sintering

Toru Itoh、Shuji Tanaka、Jing-Feng Li、Ryuzo Watanabe、Masayoshi Esashi (1.Department of Mechatronics and Precision Engineering, Tohoku University、2.Department of Materials Processing, Tohoku University、3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2002.P14-1