The Japan Society of Applied Physics

[G-8-1] High-Performance, Low-Cost SiGe:C BiCMOS Technology

B. Tillack、D. Knoll、B. Heinemann、K.-E. Ehwald、H. Rucker、R. Barth、J. Bauer、K. Blum、D. Bolze、J. Borngraber、J. Drews、G. Fischer、A. Fox、F. Fuernhammer、O. Fursenko、T. Grabolla、U. Haak、W. Hoppner、K. Kopke、D. Kruger、B. Kuck、R. Kurps、M. Marschmeyer、H. H. Richter、D. Schmidt、P. Schley、R. Scholz、W. Winkler、D. Wolansky、H.-E. Wulf、Y. Yamamoto、P. Zaumseil (1.IHP)

https://doi.org/10.7567/SSDM.2003.G-8-1