The Japan Society of Applied Physics

[D-7-4] Quantitative Evaluation of Dopant Concentration in Shallow Silicon pn Junctions by Tunneling Current Mapping with Multimode Scanning Probe Microscopy

L. Bolotov1,2、K. Fukuda2、H. Arimoto2、T. Tada2、T. Kanayama2 (1.Univ. of Tsukuba、2.Nat. Inst. of Advanced Indus. Sci. and Tech. , Japan)

https://doi.org/10.7567/SSDM.2012.D-7-4