[C-5-1] Dependence of field effect mobility of CVD graphene on its grain size

K. Yagi¹, A. Yamada¹, K. Hayashi¹, N. Harada¹, M. Tsukahara², S. Ogawa³, S. Sato¹, N. Yokoyama¹ (1.GNC-AIST, 2.ICAN-AIST, 3.NRI-AIST , Japan)

https://doi.org/10.7567/SSDM.2012.C-5-1