[A-5-1] Optimum Crystal Orientation in Rhombohedral PZT Films for FeRAM Application

H. Funakubo¹, Y. Ehara¹, T. Oikawa¹, T. Yamada^2,3, S. Utsugi¹ (1.Tokyo Inst. Tech., 2.Nagoya Univ., 3.JST (Japan))

https://doi.org/10.7567/SSDM.2013.A-5-1