[1C06-10] Nano Structure Analysis by Micro-beam

[1C10] Development of Ion Beam Analysis Systems for Innovative Measurement and Analysis on Structural Materials

*Kimikazu Sasa¹, Akiyoshi Yamazaki¹, Satoshi Ishii¹, Masanori Kurosawa¹, Shigeo Tomita¹, Masao Sataka¹, Hiroshi Naramoto¹, Hiroshi Kudo¹ (1. Univ. Tsukuba)

Keywords:Ion beam analysis, Structural materials, Hydrogen and light-element analysis, Micro beam

The 6 MV tandem accelerator is used for various ion-beam research projects at the University of Tsukuba. We have a plan to construct ion beam analysis (IBA) systems of structural materials. The IBA system equipped with a high-precision four-axis goniometer is located on the IBA beam course. It is used for heavy ion RBS and ERDA analyses on structural materials. In addition, a microbeam equipment has been constructed with the Oxford microbeams quadrupole lens system that is used to obtain a beam diameter of 1 micrometer. We will also install a superconducting detector for high-sensitivity PIXE analysis of light element in materials. It will start routine IBA measurements of structural materials in 2017.