[2C05-09] Beam Application and Measurement

[2C06] Development of a nuclear reaction analysis of boron using proton beam

*Sho Toyama¹, Shigeo Matsuyama¹, Misako Miwa¹, Igu Sho¹ (1. Tohoku Univ.)

Keywords:Ion beam, IBA, NRA, Boron Analysis

Boron has an important role in properties of semiconductor devices even in trace amounts (a few ppm). Rutherford backscattering spectroscopy method, one of the ion beam analysis methods, can non-destructively evaluate the composition and layer structure of the analyzed sample, but it’s usually difficult to analyze light elements in heavy elemental matrix. Therefore, we aimed to develop a quantitative analysis method for boron using nuclear reaction analysis of 10B(p,α)8Be. It’s one of the few microanalytical techniques capable of achieving detection limits in a few ppm range. The experiment was performed at the tandem pelletron accelerator at Tohoku University. A calibration curve was prepared using several standard samples, which enabled us to analyze trace amounts of boron.