1-11-3

Mon. Jul 10, 2023 5:00 PM - 7:00 PM Room 11 (8F 801)

Chair:Masayoshi Okamoto(Shizuoka University)

5:00 PM - 5:20 PM

[1-11-3-01] Modeling of Inductively Coupled Plasma Reactors

Xuan Luo², Zhi Yang², *Sijun Zhang¹ (1. Advanced Simulation and Modeling, Inc., 2. Beijing Easthunder Software Co. Ltd)

5:20 PM - 5:40 PM

*Haruhi Matsuyama¹, Suguru Miyauchi², Shintaro Takeuchi¹ (1. Osaka University, 2. University of Miyazaki)

5:40 PM - 6:00 PM

*Hay Duc Nguyen¹, Jae-Hoon Jung², Sung-Goon Park¹ (1. Seoul National University of Science and Technology, 2. Korea Atomic Energy Research Institute)

6:00 PM - 6:20 PM

*Noboru Maeda¹, Kazuhiro Maeda² (1. SOKEN, INC., 2. Toyota Motor Corporation)

Cancelled

6:20 PM - 6:40 PM

Zhipeng Lou¹, Adrian Herrera-Amaya², Margaret L. Byron², *Chengyu Li¹ (1. Villanova University, 2. Pennsylvania State University)

6:40 PM - 7:00 PM

*Tongtong Cui¹, Hiroshi Terashima¹, Soshi Kawai² (1. Hokkaido Univ., 2. Tohoku Univ.)