5:00 PM - 5:20 PM
[1-11-3-01] Modeling of Inductively Coupled Plasma Reactors
Keywords:Multiphysics Modleing
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Technical session
VIII. Computational Fluid Dynamics
Mon. Jul 10, 2023 5:00 PM - 7:00 PM Room 11 (8F 801)
Chair:Masayoshi Okamoto(Shizuoka University)
5:00 PM - 5:20 PM
Keywords:Multiphysics Modleing
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