AJKFED 2023 (ASME-JSME-KSME Joint Fluids Engineering Conference)

Presentation information

Technical session

VII. Experimental Fluid Dynamics

3-09-1

Wed. Jul 12, 2023 10:20 AM - 12:00 PM Room 09 (10F 1008)

Chair:Theodore Heindel(Iowa State University)

10:40 AM - 11:00 AM

[3-09-1-02] Development and evaluation of a double-sided simultaneous exposure apparatus using photolithography technology to fabricate hot film sensors for anemometers

*Takuya Katagiri1, Boguang Mi1, Kentaro Kato1, Masaharu Matsubara1 (1. Shinshu University)

Keywords: Anemometer, Film sensor, Photolithography, Photographic exposure

Abstract password authentication.
Password is required to view the abstract. Please enter a password to authenticate.

Password