AJKFED 2023 (ASME-JSME-KSME Joint Fluids Engineering Conference)

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Technical session

III. Multiphase/Multicomponent Flows

3-09-3

Wed. Jul 12, 2023 4:40 PM - 6:40 PM Room 09 (10F 1008)

Chair:Shin-ichi Tsuda(Kyushu Univ.)

6:20 PM - 6:40 PM

[3-09-3-06] Effects of the Gas Flow Rates on the CVD Process for Large-sized Silica Glass Synthesis

*Chengshuai Li1, Qianli Ma2, Haisheng Fang1 (1. Huazhong University of Science & Technology, 2. Hubei Feilihua Quartz Glass Co., Ltd)

Keywords:Silica glass, Chemical vapor deposition, Gas flow rate, Reactive flow, Numerical simulation

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