Solid-state, Fiber Lasers & Advanced Laser Materials

[ATu1-01] Fabrication of AlGaN-based vertical UV-B devices using substrate exfoliation with heated and pressurized water

*Eri Matsubara¹, Toma Nishibayashi¹, Ryosuke Kondo¹, Ryoya Yamada¹, Yoshinori Imoto¹, Koki Hattori¹, Sho Iwayama¹, Motoaki Iwaya¹, Tetsuya Takeuchi¹, Satoshi Kamiyama¹, Hideto Miyake² (1. Meijo University, 2. Mie University)