The 12th Asia-Pacific Laser Symposium

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Oral Sessions

Laser Material Processing

Laser Material Processing

Wed. Sep 6, 2023 10:30 AM - 12:00 PM Lavender II (3F)

Chair: Feng Chen (Xi'an Jiaotong University, China)

11:45 AM - 12:00 PM

[FW1-04] Controlling grain size of LTPS films for high-performance TFTs formed by excimer laser annealing

*Shu Nishida1, Keita Katayama1, Daisuke Nakamura1, Tetsuya Goto2, Hiroshi Ikenoue3 (1. Kyushu University, 2. Tohoku University, 3. Kochi University of Technology)

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Paper will be available on August 28, 2023 (Japan Standard Time/GMT+9:00).

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