Laser Material Processing

[FW1-04] Controlling grain size of LTPS films for high-performance TFTs formed by excimer laser annealing

*Shu Nishida¹, Keita Katayama¹, Daisuke Nakamura¹, Tetsuya Goto², Hiroshi Ikenoue³ (1. Kyushu University, 2. Tohoku University, 3. Kochi University of Technology)