Poster Session 2

[PDW-05] SiN/Si Heterogeneous Integration with Butt-coupling

*Ryo Sugano¹, Ryo Otake¹, Ryo Nishihata¹, Shun Fujii², Takasumi Tanabe¹ (1. Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University, 2. Department of Physics, Faculty of Science and Technology, Keio University)