Poster Session 1

[PFTu-02] Silicon laser doping of β-Ga₂O₃ by KrF excimer laser irradiation

*Misa Beppu¹, Yoshiaki Kakimoto^1,2, Daisuke Nakamura¹, Tetsuya Goto³, Hiroshi Ikenoue⁴ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University, 2. Department of Gigaphoton NEXT GLP, Kyushu University, 3. New Industry Creation Hatchery Center, Tohoku University, 4. Kochi University of Technology)