Poster

[2P1001-29-19] Heat transport properties for amorphous and polycrystalline WO3 films

*Riku Shimaura¹, Makoto Kashiwagi², Yuichiro Yamashita³, Takashi Yagi⁴, Yuki Oguchi⁵, Naoyuki Taketoshi⁶, Yuzo Shigesato⁷ (1. Aoyama gakuin University, 2. Aoyama gakuin University, 3. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 4. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 5. Aoyama gakuin University, 6. National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 7. Aoyama gakuin University)

キーワード：WO3 film, thermal conductivity, amorphous, polycrystalline, dc magnetron sputtering