The 13th Asian Thermophysical Properties Conference(ATPC2022)

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Oral Presentation

OS4

OS4-2

Wed. Sep 28, 2022 10:50 AM - 12:30 PM Room 1 (Zoom room 1)

Chair:Yasuyuki Yamamoto(National Institute of Advanced Industrial Science and Technology, Japan)

11:20 AM - 11:50 AM

[OS4-2-02] [Invited]Principle and application of the micro-beam MEMS sensor

*Yoko Tomo1, Hiroshi Takamatsu2 (1. Kyushu University, Stanford University, 2. National Institute of Technology (KOSEN) Kumamoto College)

Keywords:Thermal Conductivity, MEMS, liquid, micro-TCD