The 100th CSJ Annual Meeting

Presentation information

Academic Program (AP)

Materials Chemistry

Materials Chemistry

Wed. Mar 25, 2020 9:00 AM - 12:00 PM F1 (K501, Lecture Hall Bldg. [5F])

4F1-01~4F1-04 OAKI, Yuya
4F1-06~4F1-10 SHIMOJIMA, Atsushi
4F1-13~4F1-18 TANAKA, Kazuo

11:20 AM - 11:30 AM

[4F1-15] Analysis of interdimer reactions in Si crystal growth mechanism by CVD through chemical calculations

Oral A

○TAKEDA, Naoya; YAMAGUCHI, Katsunori; KUNIOSHI, Nilson (Sch. Creative Sci. Eng., Waseda Univ.)

PC Setting Time: 10:50-11:00

Keywords:molecular orbital method, transition state theory, surface reactions

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