3:30 PM - 3:40 PM
[1E2-40] Analysis of substitution reactions of Cl atoms adsorbed at Si(100) surfaces by quantum chemical calculations
01.Oral A
PC Setting Time : 15:20 - 15:30
Keywords:Surface reaction、Chemical vapor deposition、Simulation
Academic Program (AP)
Theoretical Chemistry, Chemoinformatics, and Computational Chemistry
Tue. Mar 20, 2018 1:20 PM - 6:30 PM E2 (1012, Bldg. 10)
1E2-27~1E2-31 YOKOGAWA, Daisuke
1E2-33~1E2-38 TAKANO, Yu
1E2-40~1E2-44 TACHIKAWA, Masanori
1E2-47~1E2-51 OKUMURA, Mitutaka
1E2-53~1E2-57 HARABUCHI, Yu
PM
3:30 PM - 3:40 PM
PC Setting Time : 15:20 - 15:30
Keywords:Surface reaction、Chemical vapor deposition、Simulation