2018 The Chemical Society of Japan

Presentation information

Academic Program (AP)

Theoretical Chemistry, Chemoinformatics, and Computational Chemistry

Theoretical Chemistry, Chemoinformatics, and Computational Chemistry

Tue. Mar 20, 2018 1:20 PM - 6:30 PM E2 (1012, Bldg. 10)

1E2-27~1E2-31 YOKOGAWA, Daisuke
1E2-33~1E2-38 TAKANO, Yu
1E2-40~1E2-44 TACHIKAWA, Masanori
1E2-47~1E2-51 OKUMURA, Mitutaka
1E2-53~1E2-57 HARABUCHI, Yu

PM

3:40 PM - 3:50 PM

[1E2-41] Analysis of surface growth inhibition reactions in CVD reactors through DFT calculations

01.Oral A

○FUJIMURA, Yoshiki; KUNIOSHI, Nilson; YAMAGUCHI, Katsunori; FUWA, Akio (Grad. Sch. Creative Sci. Eng., Waseda Univ.)

PC Setting Time : 15:20 - 15:30

Keywords:Surface reaction、etching、desorption reaction