The 99th CSJ Annual Meeting

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Academic Program (AP) [Poster]

Coordination Chemistry, Organometallic Chemistry

Coordination Chemistry, Organometallic Chemistry

Sat. Mar 16, 2019 10:00 AM - 11:30 AM P (Arena, Gymnasium and Auditorium [1F])

Presentation time：Odd Poster Number 10:00-10:45 / Even Poster Number 10:45-11:30

[1PA-167] Ab initio DFT study of acetylacetone-NiO surface reactions in plasma-based atomic layer processing

Poster

○NAKAMURA, Kana; ITO, Tomoko; KARAHASHI, Kazuhiro; HAMAGUCHI, Satoshi; TAKEUCHI, Takae (Grad. Sch. Human. Sci., Nara Women's Univ.)

Keywords:Surface reaction、Nickel Oxide、acetylacetone、ab initio DFT calculations、Dry Process

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