Mo-2: Si & IV group

[Mo2-1/Inv] Si and SiGe Epitaxial Growth in view of Nanosheet CMOS Devices and 3D Sequential Integration

*Roger Loo¹, Andriy Hikavyy¹, Clement Porret¹, Erik Rosseel¹, Gianluca Rengo^1,2,3, André Vantomme², Robert Langer¹ (1. Imec, 2. Quantum Solid State Physics, KU Leuven, 3. Fonds Wetenschappelijk Onderzoek (FWO) - Vlaanderen)