Mo-2: Si & IV group

△ [Mo2-2] Analysis of Oxygen Precipitates in CZ-Si by Parallel-Beam X-ray Diffuse Scattering

*Tomoyuki Horikawa^1,2, Yoshiyuki Tsusaka³, Junji Matsui^3,4, Tetsuya Tohei², Yusuke Hayashi², Akira Sakai² (1. GlobalWafers Japan Co.,Ltd. , 2. Osaka University, 3. University of Hyogo, 4. Synchrotron Radiation Nanotechnology Center)