We-1: Oxide

△ [We1-4] Characterization of Ion Implantation-induced Structural Damage and Recovery in β-Ga₂O₃ Using Aberration-corrected STEM

*Timothy Jinsoo Yoo¹, Xinyi Xia², Alan Jacobs³, Marko Tadjer³, Fan Ren², Stephen Pearton¹, Honggyu Kim¹ (1. Department of Materials Science and Engineering, University of Florida, 2. Department of Chemical Engineering, University of Florida, 3. Naval Research Laboratory)