19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

講演情報

We-2: MI & Characterization

Materials informatics & Characterization

We-2: MI & Characterization

2022年8月31日(水) 16:45 〜 18:30 DRIP ONLINE CONFERENCE

Chair:Jean-Pierre Landesman、Takayoshi Shimura

18:00 〜 18:15

[We2-5] 2D and 3D Investigation of Dislocation Dynamics in Semiconductor Wafers Studied by X-ray Diffraction Imaging Techniques

*Merve Pinar Kabukcuoglu1,2, Andreas Danilewsky2, Elias Hamann1, Simon Bode1,3, Simon Haaga1,2, Tilo Baumbach1,3, Daniel Hänschke1 (1. Institute for Photon Science and Synchrotron Radiation (IPS) Karlsruhe Institute of Technology (KIT), 2. Crystallography, University of Freiburg, 3. Laboratory for Applications of Synchrotron Radiation (LAS), Karlsruhe Institute of Technology (KIT))