19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

講演情報

印刷

We-P: Poster-2

General

We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

2022年8月31日(水) 18:45 〜 20:00 DRIP-Poster-ZOOM

[WeP-07] Evaluation of Lattice-Spacing of Si and SiGe by NBD using conventional TEM

*Junji Yamanaka1, Takuya Oguni1, Joji Furuya1, Kosuke O. Hara1, Keisuke Arimoto1 (1. University of Yamanashi)