19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors

講演情報

印刷

We-P: Poster-2

General

We-P: Poster-2


✳︎Participants can view e-posters and short presentation videos anytime during Aug. 29 - Sep. 8 on the DRIP XIX website.

2022年8月31日(水) 18:45 〜 20:00 DRIP-Poster-ZOOM

△ [WeP-14] Development of a high-resolution nuclear emulsion plate for X-ray topography observation of large-size semiconductor wafers

*Shunta Harada1, Kunihiro Morishima1, Nobuko Kitagawa1, Atsushi Tanaka1, Kenji Hanada2, Kotaro Ishiji3 (1. Nagoya University, 2. Aichi Synchrtron Radiation Center, 3. Kyushu Synchrotron Light Research Center)