EpiQuest, originally a Division of Nissin Electric started in 1984 was established in June, 2000 is a Japanese equipment manufacturer that produces both research MBE system and MOCVD system.

The company’s name “EpiQuest” was derived from “Quest for Epitaxy”.

We have 40 years of experience and a track record of delivering over 200 systems.

Since we have both the ultra-high vacuum technology of MBE and the gas handling technology of MOCVD, we can design and manufacture new system that combines both.

In our combine system, the MBE system for Si MBE growth and the compound semiconductor MBE system are connected by means of the transfer chamber that incorporates rotation, expansion and contraction arm transfer system, and further, they are connected to the compound semiconductor MOCVD system by means of the glove box. This system enables growth of different types of materials that uses both MBE and MOCVD systems without exposing the materials to the atmosphere. In addition, an STM chamber is also connected to the transfer chamber located on the multi-chamber side, and thus we can analyze the surface immediately after growth.

We will continue to respond to cutting-edge user needs and take on the challenge of supporting the development of new materials.