Next Generation Epitaxy

epiray introduces Thermal Laser Epitaxy (TLE) – a novel technology for the deposition of high-purity thin films. epiray is a spin-off of the Max Planck Society pioneering a new era of epitaxy research.

A new deposition technology that will significantly impact thin film research and production – available today!

TLE adds significant flexibility and speed to thin-film research. Sources can be changed rapidly without breaking vacuum, and practically any material can be used. Layers of ultra-high purity can be deposited. Multiple chambers may be served alternately with one set of lasers, thus widely different materials can be investigated in parallel. Operating costs are low, while the throughput is typically 3-4x the one of an MBE system.