Exhibitors' information
Innovation Science Co., Ltd.
Innovation Science Co., Ltd. is a distributor for HIDEN ANALYTICAL in Japan.
HIDEN ANALYTICAL design, develop and manufacture quadrupole mass spectrometers for advanced research applications and specialist process monitoring.
Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration f or process development and monitoring.
The IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions from the ion beam etch process. The system includes integrated software with process specific algorithms developed for optimum process control.
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HIDEN ANALYTICAL design, develop and manufacture quadrupole mass spectrometers for advanced research applications and specialist process monitoring.
Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration f or process development and monitoring.
The IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions from the ion beam etch process. The system includes integrated software with process specific algorithms developed for optimum process control.
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Address
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KPS East Tower 210, 3-2-1 Sakado, Takatsu-ku, Kawasaki, Kanagawa, Japan -
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