ICMBE2024

Presentation information

Oral presentation

Heterogeneous Epitaxy and Integration

Heterogeneous Epitaxy and Integration 1

Mon. Sep 9, 2024 10:15 AM - 11:45 AM Multipurpose Hall (Hall B) (1F)

Chair:Peter Carrington(University of Lancaster, United Kingdom)

10:45 AM - 11:00 AM

[MO-B1-02] Understanding the Impact of Crystalline Structure of BaTiO3 Thin Layers Epitaxially Grown on Si on its Electro-Optical Properties

〇Marina Baryshnikova1, Guillaume Croes1, Tsang Hsuan Wang1, Halil Cuma1, Saeed Sharif Azadeh1, Mark O'Steen2, Stephen Farrel2, Ganesh Sundaram2, Clement Merckling1,3 (1. Imec (Belgium), 2. Veeco Instruments Inc. (United States of America), 3. KU Leuven (Belgium))

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