Heterogeneous Epitaxy and Integration

[MO-B1-02] Understanding the Impact of Crystalline Structure of BaTiO₃ Thin Layers Epitaxially Grown on Si on its Electro-Optical Properties

〇Marina Baryshnikova¹, Guillaume Croes¹, Tsang Hsuan Wang¹, Halil Cuma¹, Saeed Sharif Azadeh¹, Mark O'Steen², Stephen Farrel², Ganesh Sundaram², Clement Merckling^1,3 (1. Imec (Belgium), 2. Veeco Instruments Inc. (United States of America), 3. KU Leuven (Belgium))