Design, Growth, and Study of Nonlinear-graded Metamorphic Buffers for Fabrication of Low-defect-density InAs(Sb)/In(Ga,Al)As/GaAs Electronic and Photonic Devices

Mikhail Chernov

11:30 〜 11:45

[MO-B1-05] Design, Growth, and Study of Nonlinear-graded Metamorphic Buffers for Fabrication of Low-defect-density InAs(Sb)/In(Ga,Al)As/GaAs Electronic and Photonic Devices

〇Mikhail Chernov¹, Dmitriy Firsov², Oleg Komkov², Pavel Brunkov¹, Victor Solov’ev¹ (1. Ioffe Inst. (Russia), 2. Saint Petersburg Electrotechnical Univ. “LETI” (Russia))

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講演情報

Heterogeneous Epitaxy and Integration

[MO-B1-05] Design, Growth, and Study of Nonlinear-graded Metamorphic Buffers for Fabrication of Low-defect-density InAs(Sb)/In(Ga,Al)As/GaAs Electronic and Photonic Devices

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